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SPIE poster #7638-93
"
From pin-point design based critical dimension metrology toward comprehensive evaluation of IC patterning integrity" (2010)
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7638-93SPIE2010FromPin-PointDesignBasedCriticalDimensionMetrologytowardcomprehensiveevaluationofICpatterningintegrity.pdf
(1394k)
Chris Sallee,
Mar 5, 2010 12:43 PM
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