System Components
- An installed ChipInsight system will include: Hardware/Server, Image stitching, design alignment, contour extraction, difference analysis, data export, project manager, viewer
- Not included: CD-SEM, Automated Image Acquisition, Image Streaming
Inputs
Input data depends on the type of the project. For a single layer project the required inputs are: - An array of CD-SEM images taken side by side, with 10-15% overlap
- A "Properties.csv" project file (copy will be provided on request) with meta data and nm-scale coordinates of CD-SEM images
- A design clip/file "design.gds" that completely covers the same area where the CD-SEM image array was taken
OutputsOutputs depend on the type of project. For a single layer project the outputs will be GDSII files for the following:
- Contours (contours.gds)
- Design+Contours (design_contours.gds)
- Differences (difference.gds)
- Design+Contours+Differences GDSII file (design_diff_cont.gds)
- Plus an additional Differences.csv file in Excel
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