ChipInsight can can be used to measure width, and the variability of width, of SEM-reported edges. This analysis is performed by measuring the distances between edges taken at different threshold levels. Absolute measurement of the feature edges and sidewall angles
requires reference metrology such as CD-AFM
and/or SEM Modeling to be used as well. Benefits Using ChipInsight for edge analysis provides relative information on feature edge variations throughout the pattern. Variability of the signal edge directly relates to the variability of the feature edge (and sidewall angle).
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